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Study of Al2O3 thin films by ALD using H2O and O3 as oxygen source for waveguide applications
by
Caballero-Espitia, D.L.
,
Lizarraga-Medina, E.G.
,
Borbon-Nuñez, H.A.
,
Contreras-Lopez, O.E.
,
Tiznado, H.
,
Marquez, H.
Published in
Optical materials
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Al2O3-Y2O3 nanolaminated slab optical waveguides by atomic layer deposition
by
Lizarraga-Medina, E.G.
,
Caballero – Espitia, D.L.
,
Jurado – Gonzalez, J.
,
López, J.
,
Marquez, H.
,
Contreras - López, O.E.
,
Tiznado, H.
Published in
Optical materials
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Optical Materials
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Atomic Layer Deposition
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Optical Waveguides
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Al2O3
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Materials Science
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Materials Science, Multidisciplinary
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Nanolaminate
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