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Novel I-Line Phase Shift Mask Technique for Submicron T-Shaped Gate Formation
by
Chen, Szu-Hung
,
Chang, Huang-Choung
,
Fu, David K.
,
Chang, Edward Y.
,
Lai, Yeong-Lin
,
Cahng, Li
Published in
Japanese Journal of Applied Physics
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Fault Diagnosis and Analysis for Marine Planetary Gearbox
by
Zhu, Zhen Rong
,
Chang, Shan
,
Jiang, Li Dong
,
Dai, Guang Hao
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Key engineering materials
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Peer Reviewed
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Journal Title
Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
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Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers
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Jpn.j.appl.phys ,Part 1. Vol. 41, No. 7A, Pp. 4489-4492. 2002
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Key Engineering Materials
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Subjects
Science & Technology
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Engineering
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1
Engineering, Electrical & Electronic
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Engineering, Mechanical
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1
Fault Diagnosis
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1
Field-Effect Transistors
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1
Frequency Domain Analysis
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Lithography
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1
Marine Planetary Gearbox
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Phase Shift Mask
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Physical Sciences
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1
Physics
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Physics, Applied
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Semiconductor Devices
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T-Shaped Gate
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Technology
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Scientific.net Journals
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Iopscience Extra
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