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Some Resists Based On Chemically-Amplified Crosslinking Of Phenolic Polymers
by
Bohland, John F.
,
Calabrese, Gary S.
,
Cronin, Michael F.
,
Canistro, Diane
,
Fedynyshyn, Theodore H.
,
Ferrari, Joseph
,
Lamola, A. A.
,
Orsula, George W.
,
Pavelchek, Edward K.
,
Sinta, Roger
,
Thackeray, James W.
,
Berry, Amanda K.
,
Pogan, Leonard E., Jr
,
Grandpre, Mark P. de
,
Feely, Wayne E.
,
Graziano, Karen A.
,
Olsen, Robert
,
Thompson, Steven
,
Winkle, Mark R.
Published in
Journal of Photopolymer Science and Technology
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Journal Of Photopolymer Science And Technology
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Materials Chemistry
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Polymers And Plastics
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