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Image analysis development for optimization of 4H–SiC trench recovery treatment by combination of gas etching and sacrificial oxidation approaches
by
Barcellona, M.
,
Badalà, P.
,
Boscaglia, M.
,
Cantiano, M.
,
Mello, D.
,
Ferlito, E.
,
Pirnaci, M.D.
,
Tenaglia, D.
,
Fragalà, M.E.
Published in
Materials science in semiconductor processing
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Different methods for the determination of damage profiles in Si from RBS-channeling spectra: a comparison
by
Albertazzi, E.
,
Bianconi, M.
,
Lulli, G.
,
Nipoti, R.
,
Cantiano, M.
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Ion versus neutral irradiation of thin films of amorphous SiO2: an in situ X-ray photoelectron spectroscopy study
by
Torrisi, Alberto
,
Licciardello, Antonino
,
Ancarani, Valentina
,
Cantiano, Massimiliano
,
Puglisi, Orazio
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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