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A review of polymethyl methacrylate (PMMA) as a versatile lithographic resist – With emphasis on UV exposure
by
Rahman, Faiz
,
Carbaugh, Daniel J.
,
Wright, Jason T.
,
Rajan, Parthiban
,
Pandya, Sneha G.
,
Kaya, Savas
Published in
Microelectronic engineering
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Photolithography with polymethyl methacrylate (PMMA)
by
Carbaugh, Daniel J
,
Wright, Jason T
,
Parthiban, Rajan
,
Rahman, Faiz
Published in
Semiconductor science and technology
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Negative tone photolithography with photo-sensitised polymethyl methacrylate (PMMA)
by
Carbaugh, Daniel J.
,
Wright, Jason T.
,
Rahman, Faiz
Published in
Microelectronic engineering
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Combination photo and electron beam lithography with polymethyl methacrylate (PMMA) resist
by
Carbaugh, Daniel J
,
Pandya, Sneha G
,
Wright, Jason T
,
Kaya, Savas
,
Rahman, Faiz
Published in
Nanotechnology
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Dry photolithography through ultraviolet radiation-induced photo-etching of polymethyl methacrylate
by
Carbaugh, Daniel J.
,
Wright, Jason T.
,
Rajan, Parthiban
,
Kaya, Savas
,
Rahman, Faiz
Published in
Thin solid films
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Lithographic tone reversal in optical exposure of polymethyl methacrylate (PMMA) resist
by
Carbaugh, Daniel J
,
Kaya, Savas
,
Rahman, Faiz
Published in
Materials research express
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Thermal oxidation of silicon in a residual oxygen atmosphere-the RESOX process-for self-limiting growth of thin silicon dioxide films
by
Wright, Jason T
,
Carbaugh, Daniel J
,
Haggerty, Morgan E
,
Richard, Andrea L
,
Ingram, David C
,
Kaya, Savas
,
Jadwisienczak, Wojciech M
,
Rahman, Faiz
Published in
Semiconductor science and technology
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Transparent and visible light-insensitive acrylic photoresist for negative tone optical lithography
by
Carbaugh, Daniel J.
,
Kaya, Savas
,
Rahman, Faiz
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Enhancing the dry etch resistance of polymethyl methacrylate patterned with electron beam lithography
by
Carbaugh, Daniel J.
,
Pandya, Sneha G.
,
Wright, Jason T.
,
Kaya, Savas
,
Rahman, Faiz
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Development-less deep ultraviolet positive tone photolithography with polymethyl methacrylate
by
Carbaugh, Daniel J.
,
Wright, Jason T.
,
Rajan, Parthiban
,
Kaya, Savas
,
Rahman, Faiz
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Plerixafor for pathogen‐agnostic treatment in murine thigh infection and zebrafish sepsis
by
Evans, Martin O.
,
Smith, Darren M.
,
Kress, Adrian T.
,
Nadeau, Robert J.
,
Selig, Daniel J.
,
Caridha, Diana
,
Racharaks, Ratanachat
,
Langowski, Thomas
,
Madejczyk, Michael S.
,
Carbaugh, Chance
,
Saunders, David
,
Widder, Mark
,
De Meese, Jason
,
Lee, Patricia J.
,
DeLuca, Jesse P.
Published in
Clinical and translational science
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A factorial analysis of input parameters using finite element techniques
by
CARBAUGH, D. F
,
FRATER, J. L
Published in
Journal of materials shaping technology
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