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Characterization of the influence of fabrication methods on microstructure failure
by
McIntyre, David G
,
Cunningham, Shawn J
,
Carper, Judd S
,
Jaramillo, Paul D
,
Tatic-Lucic, Svetlana
,
Starr, Larry E
Published in
Sensors and actuators. A. Physical.
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Sensors And Actuators. A. Physical.
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Engineering
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Engineering, Electrical & Electronic
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Fabrication Methods
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Instruments & Instrumentation
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Mechanical Shock Testing
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Microstructure Failure
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Silicon
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