Mechanistic insights of Sn-based non-chemically-amplified resists under EUV irradiation by Belmonte, Guilherme K., Cendron, Suelen W., Guruprasad Reddy, Pulikanti, Moura, Cleverson A.S., Ghulam Moinuddin, Mohamad, Peter, Jerome, Sharma, Satinder K., Albara Lando, Gabriela, Puiatti, Marcelo, Gonsalves, Kenneth E., Weibel, Daniel E.

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