Search Results - Chang-Lyong Song

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    Reduction of plasma-induced damage during intermetal dielectric deposition in high-density plasma

    Reduction of plasma-induced damage during intermetal dielectric deposition in high-density plasma by Kyung-Mun Byun, Do-Hyung Kim, Yong-Won Cha, Sang-Hyeon Lee, Min Kim, Joo-Beom Lee, In-Sun Park, Hyeon-Deok Lee, Chang-Lyong Song

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    Effect of STI shape and tunneling oxide thinning on cell Vth variation in the flash memory

    Effect of STI shape and tunneling oxide thinning on cell Vth variation in the flash memory by JaiDong Lee, JungHwan Kim, Woong Lee, SangHoon Lee, HunYoung Lim, JaeDuk Lee, SeokWoo Nam, HyeonDeok Lee, ChangLyong Song

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