Search Results - Chapek, D.L.

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    Boron doping of silicon by plasma source ion implantation

    Boron doping of silicon by plasma source ion implantation by Matyi, R.J., Chapek, D.L., Brunco, D.P., Felch, S.B., Lee, B.S.

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    Plasma Doped (PLAD) Deep Sub-Half Micron Buried Channel PMOSFETS and its Application to Next Generation ULSI Circuits

    Plasma Doped (PLAD) Deep Sub-Half Micron Buried Channel PMOSFETS and its Application to Next Generation ULSI Circuits by Ahmad, A., Prall, K., Chapek, D.L., Thakur, R.P.S., Felch, S.B., Brunco, D.P.

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    Formation of deep sub-micron buried channel pMOSFETs with plasma doping

    Formation of deep sub-micron buried channel pMOSFETs with plasma doping by Felch, S.B., Brunco, D.P., Lee, B.S., Ahmad, A., Prall, K., Chapek, D.L.

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