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Experimental and Theoretical Study of Transition Between Glow Modes of Planar Barrier Capacitive RF Discharge in Argon at One Atmosphere Pressure
by
Bazhenov, Volodymir Yu
,
Kuzmichev, Anatoliy I.
,
Tsiolko, Vyacheslav V.
,
Chaplinskiy, Roman Yu
,
Piun, Viktor M.
Published in
IEEE transactions on plasma science
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Ieee Transactions On Plasma Science
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Argon
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Atmospheric Modeling
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Atmospheric Pressure
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Current Density
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Dielectrics
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Discharges
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Plasma Properties
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Plasmas
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Radio Frequency Discharge
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