Search Results - Charatan, R.M.

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    Formation mechanism of TiN by reaction of tetrakis(dimethylamido)-titanium with plasma-activated nitrogen

    Formation mechanism of TiN by reaction of tetrakis(dimethylamido)-titanium with plasma-activated nitrogen by WEBER, A, KLAGES, C.-P, GROSS, M. E, CHARATAN, R. M, BROWN, W. L

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    Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process

    Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process by Weber, A., Nikulski, R., Klages, C.-P., Gross, M.E., Charatan, R.M., Opilan, R.L., Brown, W.L.

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