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MIM capacitor integration for mixed-signal/RF applications
by
Ng, C.H.
,
Ho, C.-S.
,
Chu, S.-F.S.
,
Sun, S.-C.
Published in
IEEE transactions on electron devices
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MIM capacitor integration for mixed-signal/RF applications : Integrated Circuits Technologies for RF Circuit Applications
by
CHIT HWEI NG
,
HO, Chaw-Sing
,
CHU, Shao-Fu Sanford
,
SUN, Shi-Chung
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IEEE transactions on electron devices
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The study of sputtered RF Ta on the PID in Cu dual damascene technology [plasma induced damage]
by
Wen Hui Lu
,
Kim Keng Teo
,
Chaw Sing Ho
,
Andrew, K.L.Y.
,
Keng Foo Lo
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