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Enhanced DRAM Single Bit Characteristics from Process Control of Chlorine
by
Rim, Taiuk
,
Che, Kyosuk
,
Kwon, Sehyun
,
Lee, Jin-Seong
,
Oh, Jeonghoon
,
Ban, Hyodong
,
Lee, Jooyoung
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Conference Proceedings
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Capacitance
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Chemical Elements
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Chemical Reactions
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Chlorine
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Cost Effectiveness
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Diffusion Barriers
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Dram
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Electric Fields
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Engineering
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Engineering, Electrical & Electronic
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Engineering, Multidisciplinary
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Fabrication
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Impurities
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Interface Trap
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Outgassing
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Physical Sciences
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Physics
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Physics, Applied
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Process
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Process Control
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Ieee Electronic Library (Iel) Conference Proceedings
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