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Implementation of High-k / Metal Gate in High-Volume Manufacturing
by
Arghavani, Reza
,
Agustine, Melody
,
Ahmed, Khaled
,
Cheng, Chern-Ping
,
Gandikota, Srinivas
,
Hung, Steven
,
Schreutelkamp, Robert
,
Yoshida, Naomi
,
Yu, May
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ECS transactions
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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