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Through-Silicon Hole Interposers for 3-D IC Integration
by
Lau, John H.
,
Lee, Ching-Kuan
,
Zhan, Chau-Jie
,
Wu, Sheng-Tsai
,
Chao, Yu-Lin
,
Dai, Ming-Ji
,
Tain, Ra-Min
,
Chien, Heng-Chieh
,
Hung, Jui-Feng
,
Chien, Chun-Hsien
,
Cheng, Ren-Shing
,
Huang, Yu-Wei
,
Cheng, Yu-Mei
,
Liao, Li-Ling
,
Lo, Wei-Chung
,
Kao, Ming-Jer
Published in
IEEE transactions on components, packaging, and manufacturing technology (2011)
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Ieee Transactions On Components, Packaging And Manufacturing Technology
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Ieee Transactions On Components, Packaging, And Manufacturing Technology
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Subjects
2.5D/3D Ic Integration
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Engineering
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Engineering, Electrical & Electronic
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Engineering, Manufacturing
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Interposer
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Materials Science
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Materials Science, Multidisciplinary
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Re-Distribution Layer
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Resists
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Science & Technology
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Silicon
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Substrates
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Technology
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Through-Silicon Hole
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Through-Silicon Via
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Through-Silicon Vias
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Tin
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Vehicles
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Ieee Xplore Open Access Journals
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Ieee Xplore
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