Search Results - Cherala, Anshuman

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  1. 1
    Extending the resolution limits of nanoshape imprint lithography using molecular dynamics of polymer crosslinking

    Extending the resolution limits of nanoshape imprint lithography using molecular dynamics of polymer crosslinking by Cherala, Anshuman, Pandya, Parth N., Liechti, Kenneth M., Sreenivasan, S. V.

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  2. 2
    Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography

    Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography by Cherala, Anshuman, Schumaker, Philip, Mokaberi, Babak, Selinidis, Kosta, Choi, Byung Jin, Meissl, Mario J., Khusnatdinov, Niyaz N., LaBrake, Dwayne, Sreenivasan, S. V.

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  3. 3
    Active wafer shape modulation using a multi-actuator chucking system

    Active wafer shape modulation using a multi-actuator chucking system by Cherala, Anshuman, Choi, Byung Jin, Lu, Xiaoming, Sreenivasan, S.V.

    Published in Precision engineering
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  4. 4
    Multifield sub-5 nm overlay in imprint lithography

    Multifield sub-5 nm overlay in imprint lithography by Ajay, Paras, Cherala, Anshuman, Yin, Bailey A., Moon, Euclid E., Fabian Pease, R., Sreenivasan, S. V.

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  5. 5
    Overlay models for nanoimprint lithography

    Overlay models for nanoimprint lithography by Roy, Nilabh, Meissl, Mario, Yoshida, Takahiro, Cherala, Anshuman, Lu, Xiaoming, Klein, Jeff, Lou, Mingji, Choi, Jin, Sekiguchi, Hiroyuki, Shibayama, Takashi, Hiura, Mitsuru

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  6. 6
    Molecular dynamics modeling framework for overcoming nanoshape retention limits of imprint lithography

    Molecular dynamics modeling framework for overcoming nanoshape retention limits of imprint lithography by Cherala, Anshuman, Sreenivasan, S. V.

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  7. 7
    Active wafer shape modulation using a multi-actuator chucking system

    Active wafer shape modulation using a multi-actuator chucking system by Cherala, Anshuman, Choi, Byung Jin, Lu, Xiaoming, Sreenivasan, S V

    Published in Precision engineering
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  8. 8
    Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors

    Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors by Cherala, Anshuman, Chopra, Meghali, Yin, Bailey, Mallavarapu, Akhila, Singhal, Shrawan, Abed, Ovadia, Bonnecaze, Roger, Sreenivasan, S. V.

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