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    Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle

    Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle by Vincent, Benjamin, Hathwar, Raghu, Kamon, Mattan, Ervin, Joseph, Schram, Tom, Chiarella, Thomas, Demuynck, Steven, Baudot, Sylvain, Siew, Yong Kong, Kubicek, Stenfan, Litta, Eugenio Dentoni, Chew, SoonAik, Mitard, Jerome

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