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Search Results - Chittock, Nicholas J
Search Results - Chittock, Nicholas J
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Isotropic atomic layer etching of GaN using SF6 plasma and Al(CH3)3
by
Chittock, Nicholas J.
,
Shu, Yi
,
Elliott, Simon D.
,
Knoops, Harm C. M.
,
Kessels, W. M. M. (Erwin).
,
Mackus, Adriaan J. M.
Published in
Journal of applied physics
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Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3
by
Chittock, Nicholas J.
,
Vos, Martijn F. J.
,
Faraz, Tahsin
,
Kessels, Wilhelmus M. M. (Erwin)
,
Knoops, Harm C. M.
,
Mackus, Adriaan J. M.
Published in
Applied physics letters
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Precise ion energy control with tailored waveform biasing for atomic scale processing
by
Faraz, Tahsin
,
Verstappen, Yuri G. P.
,
Verheijen, Marcel A.
,
Chittock, Nicholas J.
,
Lopez, Javier Escandon
,
Heijdra, Erik
,
van Gennip, Wouter J. H.
,
Kessels, Wilhelmus M. M.
,
Mackus, Adriaan J. M.
Published in
Journal of applied physics
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Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices
by
Gerritsen, Sven H.
,
Chittock, Nicholas J.
,
Vandalon, Vincent
,
Verheijen, Marcel A.
,
Knoops, Harm C. M.
,
Kessels, Wilhelmus M. M.
,
Mackus, Adriaan J. M.
Published in
ACS applied nano materials
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Investigation of the atomic layer etching mechanism for Al 2 O 3 using hexafluoroacetylacetone and H 2 plasma
by
Chittock, Nicholas J
,
Maas, Joost F W
,
Tezsevin, Ilker
,
Merkx, Marc J M
,
Knoops, Harm C M
,
Kessels, Wilhelmus M M Erwin
,
Mackus, Adriaan J M
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Investigation of the atomic layer etching mechanism for Al2O3 using hexafluoroacetylacetone and H2 plasma
by
Chittock, Nicholas J
,
Maas, Joost F W
,
Tezsevin, Ilker
,
Merkx, Marc J M
,
Knoops, Harm C M
,
Wilhelmus M M (Erwin) Kessels
,
Mackus, Adriaan J M
Published in
Journal of materials chemistry. C, Materials for optical and electronic devices
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Caractéristiques de départ et issues chez des patients atteints de COVID-19 hospitalisés dans des unités de soins intensifs à Vancouver (Canada) : série de cas
by
Mitra, Anish R
,
Fergusson, Nicholas A
,
Lloyd-Smith, Elisa
,
Wormsbecker, Andrew
,
Foster, Denise
,
Karpov, Andrei
,
Crowe, Sarah
,
Haljan, Greg
,
Chittock, Dean R
,
Kanji, Hussein D
,
Sekhon, Mypinder S
,
Griesdale, Donald E.G
Published in
Canadian Medical Association journal (CMAJ)
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Caracteristiques de depart et issues chez des patients atteints de COVID-19 hospitalises dans des unites de soins intensifs a Vancouver
by
Mitra, Anish R
,
Fergusson, Nicholas A
,
Lloyd-Smith, Elisa
,
Wormsbecker, Andrew
,
Foster, Denise
,
Karpov, Andrei
,
Crowe, Sarah
,
Haljan, Greg
,
Chittock, Dean R
,
Kanji, Hussein D
,
Sekhon, Mypinder S
,
Griesdale, Donald E.G
Published in
Canadian Medical Association journal (CMAJ)
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CMAJ : Canadian Medical Association journal = journal de l'Association medicale canadienne
by
Mitra, Anish R
,
Fergusson, Nicholas A
,
Lloyd-Smith, Elisa
,
Wormsbecker, Andrew
,
Foster, Denise
,
Karpov, Andrei
,
Crowe, Sarah
,
Haljan, Greg
,
Chittock, Dean R
,
Kanji, Hussein D
,
Sekhon, Mypinder S
,
Griesdale, Donald E G
Published in
Canadian Medical Association journal (CMAJ)
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