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Effect of nitrogen addition on the properties and thermal stability of fluorinated amorphous carbon films
by
Lai, Chia-Han
,
Lai, Wei-Shun
,
Chiue, Hua-Chun
,
Chen, Hung-Jen
,
Chang, Shou-Yi
,
Lin, Su-Jien
Published in
Thin solid films
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Processing and characterization of fluorinated amorphous carbon low-dielectric-constant films
by
CHEN, Hung-Jen
,
CHANG, Shou-Yi
,
CHIUE, Hua-Chun
,
LAI, Wei-Shun
,
LIN, Su-Jien
Published in
Journal of the Electrochemical Society
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Journal Of The Electrochemical Society
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Thin Solid Films
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Exact Sciences And Technology
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Materials Science
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Physics
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Carbon
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Chemical Vapor Deposition
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Condensed Matter: Electronic Structure, Electrical, Magnetic, And Optical Properties
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Dielectric Thin Films
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Dielectrics, Piezoelectrics, And Ferroelectrics And Their Properties
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Electrochemistry
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Flourinated Carbon
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Materials Science, Coatings & Films
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Mechanical And Acoustical Properties Of Condensed Matter
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Mechanical Properties
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Nitrogeneration
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Physical Sciences
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Science & Technology
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Sciencedirect
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Sciencedirect Freedom Collection
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Iopscience Journals
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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