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Fabrication of microelectron gun arrays using laser micromachining
by
Choi, Seong.S.
,
Jung, M.Y.
,
Kim, D.W.
,
Yakshin, M.A.
,
Park, J.Y.
,
Kuk, Y.
Published in
Microelectronic engineering
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Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
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