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NH3-RTP grown ultra-thin oxynitride layers for MOS gate applications
by
Chung, H.Y.A.
,
Dietl, W.
,
Niess, J.
,
Nényei, Z.
,
Lerch, W.
,
Wieczorek, K.
,
Krumm, N.
,
Ludsteck, A.
,
Eisele, I.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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NH 3-RTP grown ultra-thin oxynitride layers for MOS gate applications
by
Chung, H.Y.A.
,
Dietl, W.
,
Niess, J.
,
Nényei, Z.
,
Lerch, W.
,
Wieczorek, K.
,
Krumm, N.
,
Ludsteck, A.
,
Eisele, I.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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Multiple-step annealing for 50% enhanced p-conductivity of GaN
by
Chung, H.Y.A.
,
Pelzmann, A.
,
Drechsler, M.
,
Scherer, M
,
Schwegler, V.
,
Seyboth, M.
,
Kirchner, C.
,
Kamp, M.
Published in
Journal of crystal growth
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Very low threshold current density 1.3 /spl mu/m-InAsP/InGaAsP strained quantum well GRINSCH lasers grown by gas source MBE
by
Chung, H.Y.A.
,
Stareev, G.
,
Joos, J.
,
Maehnss, J.
,
Ebeling, K.
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Conference Proceeding
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Hydride Vapour Phase Epitaxy Growth of GaN Layers under Reduced Reactor Pressure
by
Chung, H.Y.A.
,
Wang, C.
,
Kirchner, Ch
,
Seyboth, M.
,
Schwegler, V.
,
Scherer, M.
,
Kamp, M.
,
Ebeling, K.J.E.
,
Beccard, R.
,
Heuken, M.
Published in
Physica status solidi. A, Applied research
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Materials Science & Engineering. B, Solid-State Materials For Advanced Technology
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Journal Of Crystal Growth
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Physica Status Solidi. A, Applied Research
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Post Nitridation Annealing
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Rtp
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Ultra-Thin Oxynitrides
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A1. Electrical Conductivities
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A1. P-Type Free Carrier Concentration
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A1. Rapid Thermal Annealing
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A1. Two-Step Annealing
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B1. Gallium Compounds
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