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3D TFT-SONOS memory cell for ultra-high density file storage applications
by
Walker, A.J.
,
Nallamothu, S.
,
Chen, E.-H.
,
Mahajani, M.
,
Herner, S.B.
,
Clark, M.
,
Cleeves, J.M.
,
Dunton, S.V.
,
Eckert, V.L.
,
Gu, J.
,
Hu, S.
,
Knall, J.
,
Konevecki, M.
,
Petti, C.
,
Radigan, S.
,
Raghuram, U.
,
Vienna, J.
,
Vyvoda, M.A.
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Conference Proceeding
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Conference Proceedings
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Fabrication
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Hafnium
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Nonvolatile Memory
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Silicon
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Sonos Devices
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Thin Film Transistors
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Tunneling
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Ieee Electronic Library (Iel) Conference Proceedings
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