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In situ measurement of porous silicon and the influence of ambient gas on its properties
by
Bilenko, D.I
,
Belobrovaja, O.Ya
,
Coldobanova, O.Yu
,
Jarkova, E.A
,
Khasina, E.I
,
Polyanskaya, V.P
,
Melnikova, T.E
,
Mysenko, I.B
,
Smirnov, V.V
,
Filippova, G.O
Published in
Sensors and actuators. A. Physical.
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Sensors And Actuators. A. Physical.
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Engineering
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Engineering, Electrical & Electronic
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In Situ Measurement
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Instruments & Instrumentation
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Low-Dimensional Silicon Structures
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Porous Silicon
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