Search Results - Cotler, Tina J

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  1. 1
    Large-signal time-domain modeling of low-pressure rf glow discharges

    Large-signal time-domain modeling of low-pressure rf glow discharges by BARNES, M. S, COLTER, T. J, ELTA, M. E

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  2. 2
    A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges

    A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges by Barnes, Michael S, Cotler, Tina J, Elta, Michael E

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  3. 3
    Chamber material effects on actinometric measurements in rf glow discharges

    Chamber material effects on actinometric measurements in rf glow discharges by Cotler, Tina J., Passow, Michael L., Fournier, Jeffrey P., Brake, Mary L., Elta, Michael E.

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  4. 4
    High quality plasma-enhanced chemical vapor deposited silicon nitride films

    High quality plasma-enhanced chemical vapor deposited silicon nitride films by COTLER, T. J, CHAPPLE-SOKOL, J

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  5. 5
    Plasma-induced damage in a planar inductively coupled etch reactor

    Plasma-induced damage in a planar inductively coupled etch reactor by COTLER, T. J, FORSTER, J, BARNES, M, KOCON, W

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  6. 6
    Erratum: ‘‘Large-signal time-domain modeling of low-pressure rf glow discharges’’ [J. Appl. Phys. 6 1 , 81 (1987)]

    Erratum: ‘‘Large-signal time-domain modeling of low-pressure rf glow discharges’’ [J. Appl. Phys. 6 1 , 81 (1987)] by Barnes, Michael S., Cotler, Tina J., Elta, Michael E.

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  7. 7
    Plasma-etch technology

    Plasma-etch technology by Cotler, T.J., Elta, M.E.

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