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4He irradiation of zircon, ZrSiO4, using a micro-patterned, Si-based energy filter
by
Nasdala, Lutz
,
Akhmadaliev, Shavkat
,
Chanmuang N., Chutimun
,
Zowalla, André
,
Csato, Constantin
,
Rüb, Michael
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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A Modeling of 4H-SiC Super-Junction MOSFETs with Filtered High Energy Implantation
by
Kupfer, Barbara
,
Koo, Sang Mo
,
Förthner, Julietta
,
Byun, Dong Wook
,
Ehrensberger, Kevin
,
Shin, Hoon Kyu
,
Oertel, Susanne
,
Rusch, Oleg
,
Lim, Minwho
,
Beuer, Susanne
,
Csato, Constantin
,
Kim, Seongjun
,
Erlbacher, Tobias
Published in
Key engineering materials
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Energy filter for tailoring depth profiles in semiconductor doping application
by
Csato, Constantin
,
Krippendorf, Florian
,
Akhmadaliev, Shavkat
,
von Borany, Johannes
,
Han, Weiqi
,
Siefke, Thomas
,
Zowalla, Andre
,
Rüb, Michael
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Journal Title
Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Key Engineering Materials
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Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms
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Nuclear Instruments And Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms/Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Subjects
Energy Filter
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3
Ion Implantation
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2
Beam Interactions
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Charge Compensation
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Depth Profiling
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Doping
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Doping Homogeneity
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Energy Use
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Epitaxial Growth
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Focused Ion Beam
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Helium Irradiation
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High Energy Implantation
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Implantation
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Instruments & Instrumentation
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Ion
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Irradiation
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Modelling
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Mosfet
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Mosfets
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Multi Epitaxial
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Sciencedirect Journals
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Scientific.net Journals
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