Search Results - Cullmann, Elmar

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  1. 1
    Advanced mask aligner lithography: new illumination system

    Advanced mask aligner lithography: new illumination system by Voelkel, Reinhard, Vogler, Uwe, Bich, Andreas, Pernet, Pascal, Weible, Kenneth J, Hornung, Michael, Zoberbier, Ralph, Cullmann, Elmar, Stuerzebecher, Lorenz, Harzendorf, Torsten, Zeitner, Uwe D

    Published in Optics express
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  2. 2
    3D structures for micro-system technology using proximity lithography

    3D structures for micro-system technology using proximity lithography by Cullmann, Elmar, Lochel, Bernd, Engelmann, Gunter, Reyerse, Constant

    Published in Solid state technology
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