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Dimensional Measurements for Micro- and Nanotechnology
by
Danzebrink, H.U.
,
Pohlenz, F.
,
Koenders, L.
,
Dai, Gao Liang
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Key engineering materials
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Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining
by
Lehrer, C.
,
Frey, L.
,
Petersen, S.
,
Sulzbach, Th
,
Ohlsson, O.
,
Dziomba, Th
,
Danzebrink, H.U.
,
Ryssel, H.
Published in
Microelectronic engineering
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Ellipsometric measurements on single-crystal silicon spheres [for Avogadro's constant determination]
by
Danzebrink, H.U.
,
Wolff, H.
,
Becker, P.
,
Koenders, L.
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