Si sputtering yield amplification: a study of the collisions cascade and species in the sputtering plasma by Cruz, J, Sanginés, R, Soto-Valle, G, Muhl, S, Sierra, I, De Lucio-Morales, O, Ruvalcaba, J L, Mitrani, A, Calderón-Olvera, R M, Mendoza-Pérez, R, Machorro-Mejía, R

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