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PREPARATION AND EVALUATION OF VACUUM-DEPOSITED THIN-FILM CAPACITORS
by
Degenhart ,Hans J
,
Pratt,Isaac H
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Format
Reports
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Subjects
Capacitors
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Circuits
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Coatings
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Dielectric Films
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Electrical Properties
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Ferroelectric Materials
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Manufacturing
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Monoxides
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Physical Properties
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Preparation
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Processing
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Silicon Compounds
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Subminiature Electronic Equipment
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Surface Properties
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Thin Film Electronics
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Thin Film Storage Devices
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Thin Films
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Dtic Technical Reports
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