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Effective Defect Control in TiN Metal Hard Mask Cu/Low-k Dual Damascene Process
by
Kabansky, Alexander
,
Tan, Samantha S.H.
,
Hudson, Eric A.
,
Delgadino, Gerardo
,
Gancs, Lajos
,
Marks, Jeffrey
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Conference Proceeding
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Frequency optimization for capacitively coupled plasma source
by
Bera, K.
,
Hoffman, D.
,
Shannon, S.
,
Delgadino, G.
,
Yan Ye
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IEEE transactions on plasma science
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Velocity interferometry technique used to measure the expansion and compression phases of a sonoluminescent bubble
by
Delgadino, Gerardo A.
,
Bonetto, Fabian J.
Published in
Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics
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