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Optimization of atomic layer deposition of Al2O3 films as possible template for graphene transfer
by
Blagoev, B S
,
Delibatov, D A
,
Mehandzhiev, V B
,
Sveshtarov, P
,
Terziyska, P
,
Avramova, I
,
Rafailov, P M
Published in
Journal of physics. Conference series
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Journal Of Physics. Conference Series
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Journal Of Physics: Conference Series
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Aluminum Oxide
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Atomic Layer Epitaxy
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Chemical Vapor Deposition
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Copper
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Deionization
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