Fabrication of single crystal diamond microchannels for micro-electromechanical systems by Fu, J., Zhu, T.F., Zhang, M.H., Zhang, X., Li, F.N., Liu, Z.C., Denu, G.A., Wang, Y.F., Zhao, D., Shao, G.Q., Chang, X.H., Wang, W., Zhang, J.W., Wang, H.X., Wang, J.J., Hou, X.

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