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Effect of the pulse frequency on the structure, mechanical and tribological properties of Ti-Al-Ta-N coatings deposited by HiPIMS
by
Shugurov, A.R.
,
Derbin, A.Yu
,
Kuzminov, E.D.
Published in
Vacuum
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Effect of N2 to total pressure ratio on the structure, mechanical and tribological properties of magnetron-sputtered Ti-Al-Ta-Si-N coatings
by
Shugurov, A.R.
,
Kuzminov, E.D.
,
Derbin, A.Yu
,
Panin, A.V.
,
Dmitriev, A.I.
Published in
Surface & coatings technology
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Surface & Coatings Technology
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Vacuum
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Materials Science
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Mechanical Properties
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Microstructure
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Physical Sciences
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Physics, Applied
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Tribological Behavior
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Hipims
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Magnetron Sputtering
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Pn2/Pt Ratio
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Ti-Al-Ta-N Coatings
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Ti-Al-Ta-Si-N Coatings
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Backfile Package - Physics General (Legacy) [Ypa]
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Backfile Package - Materials Science [Yms]
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