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Fully scaled 0.5 mu m MOS circuits by synchrotron radiation x-ray lithography: Device fabrication and overlay evaluation
by
Silverman, J P
,
Dimilia, V
,
Katcoff, D
,
Wang, L K
,
Warlaumont, J M
,
Wilson, A D
,
Devenuto, R
,
Hill, B
,
Hsia, L C
,
Rippstein, R
Published in
Microelectronic engineering
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Fully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
by
Silverman, J.P.
,
Dimilia, V.
,
Katcoff, D.
,
Wang, L.K.
,
Warlaumont, J.M.
,
Wilson, A.D.
,
Devenuto, R.
,
Hill, B.
,
Hsia, L.C.
,
Rippstein, R.
Published in
Microelectronic engineering
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Corrosion of thin film magnetic disk: galvanic effects of the carbon overcoat
by
BRUSIC, V
,
RUSSAK, M
,
SCHAD, R
,
FRANKEL, G
,
SELIUS, A
,
DIMILIA, D
,
EDMONSON, D
Published in
Journal of the Electrochemical Society
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Institute Of Physics:jisc Collections:iop Publishing Read And Publish 2024-2025 (Reading List)
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