Search Results - Divecha, R.R.

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    Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing

    Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing by Stine, B.E., Ouma, D.O., Divecha, R.R., Boning, D.S., Chung, J.E., Hetherington, D.L., Harwoo, C.R., Nakagawa, O.S., Soo-Young Oh

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