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Improving structural, optical, and electrical properties of μc-Si:H using non-uniform hydrogen dilution treatment on RF-PECVD prepared layers
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Dorostghol, Zahra
,
Kosarian, Abdolnabi
Published in
Materials science in semiconductor processing
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Materials Science In Semiconductor Processing
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Crystallization
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Hydrogen Dilution
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Hydrogenated Microcrystalline Silicon
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Pecvd
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Uniform And Non-Uniform Profiles
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Sciencedirect Journals
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