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    Micromechanical tensile test investigation to identify elastic and toughness properties of thin nitride compound layers

    Micromechanical tensile test investigation to identify elastic and toughness properties of thin nitride compound layers by Arnaud, P., Heripre, E., Douit, F., Aubin, V., Fouvry, S., Guiheux, R., Branger, V., Michel, G.

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