Search Results - Dovilliare, G.

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    Hartmann wave-front measurement at 13.4 nm with EUV/120 accuracy

    Hartmann wave-front measurement at 13.4 nm with EUV/120 accuracy by Mercere,P., Zeitounn, P., Idir, M., Le Pape, S., Douillet, D., Leveq, X., Dovilliare, G., Bucourt, S., Goldberg, K., Naulleau, P., Rekawa, S.

    Published in Optics letters
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