Search Results - Dulkin, AE

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    The study of GaAs reactive ion etching in Cl2/Ar

    The study of GaAs reactive ion etching in Cl2/Ar by Dulkin, AE, Pyataev, VZ, Sokolova, NO, Moshkalyov, SA, Smirnov, AS, Frolov, KS

    Published in Vacuum
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    III–V compound semiconductor reactive ion etching in chlorine and methane containing mixtures

    III–V compound semiconductor reactive ion etching in chlorine and methane containing mixtures by Dulkin, A.E., Moshkalyov, S.A., Pyataev, V.Z., Smirnov, A.S., Frolov, K.S.

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    The study of GaAs reactive ion etching in Cl 2/Ar

    The study of GaAs reactive ion etching in Cl 2/Ar by Dulkin, AE, Pyataev, VZ, Sokolova, NO, Moshkalyov, SA, Smirnov, AS, Frolov, KS

    Published in Vacuum
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