IC compatible MEMS technology by Grenier, K., Mazenq, L., Dubuc, D., Bouchriha, F., Coccetti, F., Ojefors, E., Eindberg, P., Rydberg, A., Berntgen, J., Rabe, W.J., Sonmez, E., Abele, P., Schumacher, H., Plana, R.

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