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Origins of residual stress in thin films: Interaction between microstructure and growth kinetics
by
Engwall, A.M.
,
Rao, Z.
,
Chason, E.
Published in
Materials & design
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Effect of substrate tilt on sputter-deposited AuTa films
by
Engwall, A.M.
,
Bayu Aji, L.B.
,
Baker, A.A.
,
Shin, S.J.
,
Bae, J.H.
,
McCall, S.K.
,
Moody, J.D.
,
Kucheyev, S.O.
Published in
Applied surface science
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Enhanced properties of tungsten films by high-power impulse magnetron sputtering
by
Engwall, A.M.
,
Shin, S.J.
,
Bae, J.
,
Wang, Y.M.
Published in
Surface & coatings technology
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Effects of growth rate and dynamic substrate tilt on properties of Au-Ta alloy films deposited by high-power impulse magnetron sputtering
by
Kim, E.
,
Engwall, A.M.
,
Merlo, J.B.
,
Shin, S.J.
,
Goodelman, D.C.
,
Baker, A.A.
,
Taylor, G.V.
,
Kucheyev, S.O.
,
Bayu Aji, L.B.
Published in
Surface & coatings technology
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Sputter deposition of high electrical resistivity Au-Ta alloy coatings on rotating substrates
by
Engwall, A.M.
,
Bayu Aji, L.B.
,
Shin, S.J.
,
Baker, A.A.
,
Bae, J.H.
,
McCall, S.K.
,
Moody, J.D.
,
Kucheyev, S.O.
Published in
Thin solid films
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Stress evolution during growth of 1-D island arrays: Kinetics and length scaling
by
Chason, E.
,
Engwall, A.M.
,
Miller, C.M.
,
Chen, C.-H.
,
Bhandari, A.
,
Soni, S.K.
,
Hearne, S.J.
,
Freund, L.B.
,
Sheldon, B.W.
Published in
Scripta materialia
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