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Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators
by
Yandrapalli, Soumya
,
Eroglu, Seniz Esra Kucuk
,
Plessky, Victor
,
Atakan, H. Baris
,
Villanueva, Luis Guillermo
Published in
Journal of microelectromechanical systems
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Study of Thin Film LiNbO 3 Laterally Excited Bulk Acoustic Resonators
by
Yandrapalli, Soumya
,
Eroglu, Seniz Esra Kucuk
,
Plessky, Victor
,
Atakan, H. Baris
,
Villanueva, Luis Guillermo
Published in
Journal of microelectromechanical systems
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Journal Of Microelectromechanical Systems
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5 Ghz
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5G Application
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A1 Mode
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Acoustic Filters
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Aluminum
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Bulk Acoustic Resonator
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Bulk Acoustic Wave Devices
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Couplings
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Electrodes
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Electromechanical Coupling
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Engineering
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Engineering, Electrical & Electronic
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Fabrication
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Instruments & Instrumentation
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K2T
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Lamb Wave
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Large Bandwidth
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Lithium Niobate
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Lithium Niobates
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Lithography
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Ieee Electronic Library (Iel) Journals
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