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Recombination enhanced suppression of deep trap accumulation in silicon during He + ion implantation
by
Erokhin, Yu.N.
,
Ravi, J.
,
White, C.W.
,
Rozgonyi, G.A.
Published in
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
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Mesotaxy by nickel diffusion into a buried amorphous silicon layer
by
Erokhin, Yu.N.
,
Grötzschel, R.
,
Oktyabrsky, S.R.
,
Roorda, S.
,
Sinke, W.
,
Vyatkin, A.F.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
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Materials Science & Engineering. B, Solid-State Materials For Advanced Technology
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Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
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Elsevier Sd Backfile Engineering And Technology
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Sciencedirect - Materials Science Backfile Journals
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