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Gas sensitivity of PECVD β-Ga2O3 films with large active surface
by
Almaev, A.V.
,
Yakovlev, N.N.
,
Chernikov, E.V.
,
Erzakova, N.N.
,
Mochalov, L.A.
,
Kudryashov, M.A.
,
Kudryashova, YuP
,
Nesov, S.N.
Published in
Materials chemistry and physics
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Materials Chemistry And Physics
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Gallium Oxide
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Gas Sensitivity
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Pecvd
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