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Micro/Nanostructure Engineering of Epitaxial Piezoelectric α‑Quartz Thin Films on Silicon
by
Zhang, Qianzhe
,
Sánchez-Fuentes, David
,
Desgarceaux, Rudy
,
Escofet-Majoral, Pau
,
Oró-soler, Judith
,
Gázquez, Jaume
,
Larrieu, Guilhem
,
Charlot, Benoit
,
Gómez, Andrés
,
Gich, Martí
,
Carretero-Genevrier, Adrián
Published in
ACS applied materials & interfaces
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Acs Applied Materials & Interfaces
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Subjects
Engineering Sciences
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Epitaxial Growth
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Materials Science
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Materials Science, Multidisciplinary
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Nanoscience & Nanotechnology
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Nanostructuration
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Piezoelectricity
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Quartz
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Science & Technology
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Science & Technology - Other Topics
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Silicon
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Technology
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Thin Films
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American Chemical Society:jisc Collections:american Chemical Society Read & Publish Agreement 2022-2024 (Reading List)
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