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Combined analysis methods for investigating titanium and nickel surface contamination after plasma deep etching
by
Ettouri, Rim
,
Tillocher, Thomas
,
Lefaucheux, Philippe
,
Boutaud, Bertrand
,
Fernandez, Vincent
,
Fairley, Neal
,
Cardinaud, Christophe
,
Girard, Aurélie
,
Dussart, Rémi
Published in
Surface and interface analysis
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Une ordonnance pour l’excellence académique
by
Hussain Assad, Hassan Wafi
,
Ettouri, Sara
,
Labiad, Rim
,
Ben Chakroun, Nadia
,
Quessar, Asmaa
,
Ben Abdelaziz, Ahmed
Published in
Tunisie Medicale
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Journal Title
Surface And Interface Analysis
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Tunisie Medicale
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Subjects
Chemistry
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Chemistry, Physical
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1
Chlorine
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Condensed Matter
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Contamination
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Energy Dispersive X‐Ray Spectroscopy
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Engineering Sciences
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Fluorine
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Imaging
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Inductively Coupled Plasma
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Materials Science
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Microscopy
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Nickel
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Optical Microscopy
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Oxidation
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Photoelectrons
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Physical Sciences
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Physics
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Plasma Etching
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Plasmas
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Wiley-Blackwell Journals (Backfile Content)
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Wiley Blackwell Journals
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Wiley-Blackwell Read & Publish Collection
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Ezb Electronic Journals Library
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Pubmed Central
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Wiley-Blackwell Materials Science Backfiles
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