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Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
by
Duval, Fabrice F.C.
,
Wilson, Stephen A.
,
Ensell, Graham
,
Evanno, Nicolas M.P.
,
Cain, Markys G.
,
Whatmore, Roger W.
Published in
Sensors and actuators. A. Physical.
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Sensors And Actuators. A. Physical.
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Blocking Force
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Cantilevers
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Force Sensors
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