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Optimization of Electrodes Design for PZT Thin-Film Actuated Membranes
by
F.Casset
,
Michaud, H.
,
Ricart, T.
,
Le Rhun, G.
,
Cueff, M.
,
Abergel, J.
,
Ancey, P.
,
Faralli, D.
,
Devos, A.
,
Fanget, S.
,
Defaÿ, E.
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