Search Results - FABREGUETTE, Eh

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    Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

    Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates by GRONER, M. D, ELAM, J. W, FABREGUETTE, Eh, GEORGE, S. M

    Published in Thin solid films
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