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Analysis of GIDL-Induced off-State Breakdown in High-Voltage Depletion-Mode nMOSFETs
by
Chen, J F
,
Chin-Rung Yan
,
Yin-Chia Lin
,
Jhen-Jhih Fan
,
Sheng-Fu Yang
,
Wen-Chieh Shih
Published in
IEEE transactions on electron devices
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Application of VUV irradiation to promote the wet etch resistance of PSZ-SOG film inside the gap
by
Chen, Chia-Ming
,
Yeh, Ming-Hsin
,
Chien, Hung-Ju
,
Fan, Jhen-Jhih
,
Yan, Chin-Rung
,
Matsuo, Hiroshi
Published in
Microelectronic engineering
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Ieee Transactions On Electron Devices
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Gate-Induced Drain Leakage
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Implants
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